STEVEN L. GIRSHICK

 

 

 

Professor, Mechanical Engineering

 

Contact Info:

Phone: (612) 625-5315

Office: ME 2101E

Email: slg@tc.umn.edu

 

 

 

 

 

Professional Preparation

  • Massachusetts Institute of Technology, Humanities and Science, B.S., 1970
  • Stanford University, Mechanical Engineering, M.S., 1981
  • Stanford University, Mechanical Engineering, Ph.D., 1985

Professional Appointments

á      Professor, Mechanical Engineering, UMN

á      Director, Mechanical Engineering Graduate Studies, UMN

á      Graduate Faculty Member, Chemical Engineering and Materials Sciences, UMN

 

Selected Publications

  • S.-M. Suh, S. L. Girshick and M. R. Zachariah, "The Role Of Total Pressure In Gas Phase Nucleation:  A Diffusion Effect," Journal of Chemical Physics 118, 736-745 (2003).
  • S.-M. Suh, S. L. Girshick, U. R. Kortshagen and M. R. Zachariah, "Modeling Gas-Phase Nucleation in Inductively-Coupled Silane-Oxygen Plasmas," Journal of Vacuum Science and Technology A 21, 251-264 (2003).
  • F. Liao, S. Park, J. M. Larson, M. R. Zachariah and S. L. Girshick, "High-Rate Chemical Vapor Deposition of Nanocrystalline Silicon  Carbide Films by Radio Frequency Thermal Plasma," Materials Letters 57, 1982-1986 (2003).
  • W. W. Gerberich, W. M. Mook, C. R. Perrey, C. B. Carter, M. I. Baskes, R. Mukherjee, A. Gidwani, J. Heberlein, P. H. McMurry and S.  L. Girshick, "Superhard Silicon Nanospheres," Journal of the Mechanics and Physics of Solids 51, 979-992 (2003).
  • S. Nijhawan, P. H. McMurry, M. T. Swihart, S.-M. Suh, S. L. Girshick,  S. A. Campbell and J. E. Brockmann, "An Experimental and Numerical Study of Particle Nucleation and Growth during Low-Pressure Thermal Decomposition of Silane," Journal of Aerosol Science 34, 691-711 (2003).
  • T. Kim, S.-M. Suh, S. L. Girshick, M. R. Zachariah, P. H. McMurry, R.M. Rassel, Z. Shen and S. A. Campbell, "Particle Formation during Low-Pressure Chemical Vapor Deposition from Silane and Oxygen; Measurement, Modeling, and Film Properties," Journal of Vacuum  Science and Technology A:  Vacuum, Surfaces and Films 20, 413-423 (2002).
  • S.-M. Suh, M. R. Zachariah and S. L. Girshick, "Numerical Modeling of Silicon Oxide Particle Formation and Transport in a One-Dimensional Low-Pressure Chemical Vapor Deposition Reactor," Journal of Aerosol Science 33, 943-959 (2002).
  • S. M. Suh, M. R. Zachariah and S. L. Girshick, "Modeling Particle Formation During Low Pressure Silane Oxidation:  Detailed Chemical Kinetics and Aerosol Dynamics," Journal of Vacuum Science and Technology A:  Vacuum, Surfaces and Films 19, 940-951 (2001).
  • J. Heberlein, O. Postel, S. Girshick, P. McMurry, W. Gerberich, D. Iordanoglou, F. Di Fonzo, D. Neumann, A. Gidwani, M. Fan and N. Tymiak, "Thermal Plasma Deposition of Nanophase Hard Coatings," Surface and Coatings Technology 142-144, 265-271 (2001).

 

 

Synergistic Activities

  • Investigator for Center of NanoEnergetics Research, U.S. Army and UMN