|

Professor,
Mechanical Engineering
Contact Info:
Phone: (612)
625-5315
Office: ME 2101E
Email: slg@tc.umn.edu
|
- Massachusetts
Institute of Technology, Humanities and Science, B.S., 1970
- Stanford University,
Mechanical Engineering, M.S., 1981
- Stanford University,
Mechanical Engineering, Ph.D., 1985
Professional
Appointments
á
Professor,
Mechanical Engineering, UMN
á
Director,
Mechanical Engineering Graduate Studies, UMN
á
Graduate
Faculty Member, Chemical Engineering and Materials Sciences, UMN
Selected
Publications
- S.-M. Suh, S. L.
Girshick and M. R. Zachariah, "The Role Of Total Pressure In Gas
Phase Nucleation: A Diffusion Effect," Journal of Chemical
Physics 118,
736-745 (2003).
- S.-M. Suh, S. L.
Girshick, U. R. Kortshagen and M. R. Zachariah, "Modeling Gas-Phase
Nucleation in Inductively-Coupled Silane-Oxygen Plasmas," Journal
of Vacuum Science and Technology A
21, 251-264 (2003).
- F. Liao, S. Park, J.
M. Larson, M. R. Zachariah and S. L. Girshick, "High-Rate Chemical
Vapor Deposition of Nanocrystalline Silicon Carbide Films by Radio
Frequency Thermal Plasma," Materials Letters 57,
1982-1986 (2003).
- W. W. Gerberich, W.
M. Mook, C. R. Perrey, C. B. Carter, M. I. Baskes, R. Mukherjee, A.
Gidwani, J. Heberlein, P. H. McMurry and S. L. Girshick,
"Superhard Silicon Nanospheres," Journal of the Mechanics
and Physics of Solids
51, 979-992 (2003).
- S. Nijhawan, P. H.
McMurry, M. T. Swihart, S.-M. Suh, S. L. Girshick, S. A. Campbell
and J. E. Brockmann, "An Experimental and Numerical Study of
Particle Nucleation and Growth during Low-Pressure Thermal Decomposition
of Silane," Journal of Aerosol Science
34, 691-711 (2003).
- T. Kim, S.-M. Suh,
S. L. Girshick, M. R. Zachariah, P. H. McMurry, R.M. Rassel, Z. Shen and
S. A. Campbell, "Particle Formation during Low-Pressure Chemical
Vapor Deposition from Silane and Oxygen; Measurement, Modeling, and Film
Properties," Journal of Vacuum Science and Technology
A: Vacuum, Surfaces and Films
20, 413-423 (2002).
- S.-M. Suh, M. R.
Zachariah and S. L. Girshick, "Numerical Modeling of Silicon Oxide
Particle Formation and Transport in a One-Dimensional Low-Pressure
Chemical Vapor Deposition Reactor," Journal of Aerosol Science
33, 943-959 (2002).
- S. M. Suh, M. R.
Zachariah and S. L. Girshick, "Modeling Particle Formation During
Low Pressure Silane Oxidation: Detailed Chemical Kinetics and
Aerosol Dynamics," Journal of Vacuum Science and Technology
A: Vacuum, Surfaces and Films
19, 940-951 (2001).
- J. Heberlein, O.
Postel, S. Girshick, P. McMurry, W. Gerberich, D. Iordanoglou, F. Di
Fonzo, D. Neumann, A. Gidwani, M. Fan and N. Tymiak, "Thermal
Plasma Deposition of Nanophase Hard Coatings," Surface and
Coatings Technology
142-144, 265-271 (2001).
Synergistic
Activities
- Investigator for
Center of NanoEnergetics Research, U.S. Army and UMN
|