Professional Preparation:

Professional Appointments

Professor of Electrical and Computer Engineering, 1997-2007
Founding Director, Center for Nanostructure Applications, 2006-present
Institute of Technology Distinguished Professor, 2006-present
Director, NanoFabrication Center, 1999-present

Selected Publications

Rebekah K. Ligman, Stephen A. Campbell, Lorenzo Mangolini and Uwe Kortshagen, "Electroluminescence from Surface Oxidized Silicon Nanoparticles Dispersed Within a Polymer Matrix", Applied Physics Letters 90, 061116 (2007)

Patrizio Cernetti, Ryan Gresback, Stephen A. Campbell and Uwe Kortshagen, "Nonthermal plasma synthesis of highly oriented Germanium nanocrystals", Chem Vap Dep. 13, pp. 345-350 (2007)

Ameya Bapat, Marco Gatti, Yong-Ping Ding, Stephen Campbell and Uwe Kortshagen, "A plasma process for the synthesis of cubic-shaped silicon nanocrystals for nanoelectronic devices", J. Applied Phys. D 40 No 8 (21 April 2007) 2247-2257 (2007)

X.D. Pi, L. Mangolini, J. Schidmit, and U. Kortshagen, and S. A. Campbell, "Room-temperature atmospheric oxidation of Si nanocrystals after etching in HF acid vapor", Physical Review B 75, March 15 p. 085423-1 to 085423-5 (2007)

Yongping Ding, Ying Dong, Ameya Bapat, Julia Deneen, C. Barry Carter, Uwe R. Kortshagen, and Stephen A. Campbell, "A Single Nanoparticle Silicon Transistor", IEEE Trans. Elect. Dev. 53(10), pp. 2525-2531 (2006).

Yongping Ding and S.A. Campbell, "Quantum Size Effect in the Nanostructure PtSi/Si Contacts", Applied Physics Letters 89, 093508 (2006)

Bing Luo, Dan Yu, Benjamin E. Kucera, Stephen A. Campbell, and Wayne L. Gladfelter, "Synthesis and Structures of Bis(2-dimethylaminoethyl)amine Adducts of Strontium Bis(2,2,6,6-tetramethylheptane-3,5-dionate) and Their Use in the Chemical Vapor Deposition of Strontium Hafnium Oxides", CVD accepted for publication (2006)

"Hafnium Titanate as a High Permittivity Gate Insulator: Electrical and Physical Characteristics and Thermodynamic Stability", Min Li, Zhihong Zhang, Stephen A. Campbell, Hong-Jyh Li, and Jeff J. Peterson, J. Appl. Phys. 101, pp. 044509-1 to 044509-9 (2007)

I. McCarthy, M.P. Agustin, S. Shamuilia, S. Stemmer, V. V. Afanas'ev, and S. A. Campbell, "Strontium Hafnate Films Deposited by Physical Vapor Deposition", Thin Solid Films 515(4), 5 December 2006, Pages 2527-2530 (2006)

Z. Zhang, B. Xia, W.L. Gladfelter, S. A. Campbell, "The Deposition of Hafnium Oxide from Hf t-butoxide and Nitric Oxide", JVST A 24(3) 418-423 May/June (2006)